The Meaning And Measure Of Lateral Resolution In Optical Surface Topography Measurements
Note: This meeting will be at Optikos Corporation
Traditional specifications for resolving power for imaging systems rely either single numbers, such as the familiar Rayleigh or Sparrow criteria, or detailed response information as a function of spatial frequency, as in the modulation transfer function or MTF. Currently there is quite an active debate within the international standards community regarding the meaning, specification and verification of lateral resolution in a 3D height map. This debate is taking place simultaneously in commerce, where one observes a divergence by as much as a factor of ten in quoted lateral resolution for topography instruments that have comparable resolving power. Here I make some modest proposals aimed at clarifying terminology and validation, based in part on the detailed physical behavior of optical areal surface topography instruments, including in particular phase-shifting and coherence-scanning interferometers.
MEETING SPONSORED BY
Peter de Groot, Zygo Corporation
Peter de Groot, Ph.D. invents and develops optical instruments for Zygo Corporation, where he is Executive Director of R&D. A physics graduate from the University of Connecticut, Dr. de Groot has published 128 technical papers and is an inventor for 122 US patents in optics. His current interests include surface structure analysis, industrial quality control, stage motion measurement, interference microscopy, laser interferometry, optical testing, signal processing, international metrology standards, and management of intellectual property. He is an SPIE Fellow and active member of the optics community.
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